Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

  1. López, E.
  2. Chiussi, S.
  3. Serra, J.
  4. González, P.
  5. Serra, C.
  6. Kosch, U.
  7. León, B.
  8. Fabbri, F.
  9. Fornarini, L.
  10. Martelli, S.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2004

Volume: 234

Issue: 1-4

Pages: 422-428

Type: Conference paper

DOI: 10.1016/J.APSUSC.2004.05.053 GOOGLE SCHOLAR
Data source: Scopus