Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

  1. López, E.
  2. Chiussi, S.
  3. Serra, J.
  4. González, P.
  5. Serra, C.
  6. Kosch, U.
  7. León, B.
  8. Fabbri, F.
  9. Fornarini, L.
  10. Martelli, S.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 2004

Volumen: 234

Número: 1-4

Pages: 422-428

Type: Communication dans un congrès

DOI: 10.1016/J.APSUSC.2004.05.053 GOOGLE SCHOLAR
La source de données: Scopus