Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing

1. López, E.
2. Chiussi, S.
3. Serra, J.
4. González, P.
5. Serra, C.
6. Kosch, U.
7. León, B.
8. Fabbri, F.
9. Fornarini, L.
10. Martelli, S.