Influence of the substrate temperature on the structure of Ge containing thin films produced by ArF laser induced chemical vapour deposition

  1. López, E.
  2. Chiussi, S.
  3. González, P.
  4. Serra, J.
  5. León, B.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2005

Volume: 248

Issue: 1-4

Pages: 108-112

Type: Conference paper

DOI: 10.1016/J.APSUSC.2005.03.091 GOOGLE SCHOLAR
Data source: Scopus