Influence of the substrate temperature on the structure of Ge containing thin films produced by ArF laser induced chemical vapour deposition
- López, E.
- Chiussi, S.
- González, P.
- Serra, J.
- León, B.
ISSN: 0169-4332
Year of publication: 2005
Volume: 248
Issue: 1-4
Pages: 108-112
Type: Conference paper