Influence of the substrate temperature on the structure of Ge containing thin films produced by ArF laser induced chemical vapour deposition

  1. López, E.
  2. Chiussi, S.
  3. González, P.
  4. Serra, J.
  5. León, B.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2005

Alea: 248

Zenbakia: 1-4

Orrialdeak: 108-112

Mota: Biltzar ekarpena

DOI: 10.1016/J.APSUSC.2005.03.091 GOOGLE SCHOLAR
Datuen iturria: Scopus