Influence of the substrate temperature on the structure of Ge containing thin films produced by ArF laser induced chemical vapour deposition
- López, E.
- Chiussi, S.
- González, P.
- Serra, J.
- León, B.
ISSN: 0169-4332
Argitalpen urtea: 2005
Alea: 248
Zenbakia: 1-4
Orrialdeak: 108-112
Mota: Biltzar ekarpena