Effects of deposition temperature on properties of r.f. glow discharge amorphous silicon thin films

  1. Bertran, E.
  2. Andújar, J.L.
  3. Canillas, A.
  4. Roch, C.
  5. Serra, J.
  6. Sardin, G.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1991

Volume: 205

Issue: 2

Pages: 140-145

Type: Article

DOI: 10.1016/0040-6090(91)90295-9 GOOGLE SCHOLAR
Data source: Scopus