Effects of deposition temperature on properties of r.f. glow discharge amorphous silicon thin films

  1. Bertran, E.
  2. Andújar, J.L.
  3. Canillas, A.
  4. Roch, C.
  5. Serra, J.
  6. Sardin, G.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 1991

Volumen: 205

Número: 2

Pages: 140-145

Type: Article

DOI: 10.1016/0040-6090(91)90295-9 GOOGLE SCHOLAR
La source de données: Scopus